By James F. Ziegler,J. F. Ziegler
The ebook is split into components. half 1 discusses themes similar to the historical past of the ion implantation; the different sorts and reasons of ion implanters; the penetration of vigorous ions into solids; harm annealing in silicon; and ion implantation metallurgy. half 2 covers components equivalent to ion implementation approach innovations; ion assets; underlying rules regarding ion optics; and protection and radiation concerns in ion implantation.
The textual content is usually recommended for engineers who wish to be accustomed to the rules and strategies in the back of ion implantation or make reviews at the field.
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